Laser Doppler Vibrometer

Piezoelectric active mirror suspension embedded into Low Temperature Co-fired Ceramic

Common Ground / Dielectrics / Cost effectiveness / Impedance / Piezoelectricity / Piezoelectric / Lcr Meter / Fabry Perot / Electrodes / Laser Doppler Vibrometer / Laser Micromachining / Lamination / Resonant Frequency / Piezoelectric / Lcr Meter / Fabry Perot / Electrodes / Laser Doppler Vibrometer / Laser Micromachining / Lamination / Resonant Frequency